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  2. Classification of charging standards
  3. Nano Process-Charges

Inductive Couple Plasma Etcher-Charges

  1. Project:  $350/0.25 hours for self-operation; $650/0.25 hours for delegated operation

Instrument training fee: $1700/class, instrument certification fee: $700/class

  1. Non-project: $650/0.25 hours for self-operation; $750/0.25 hours for delegated operation

Instrument training fee: $1700/class, instrument certification fee: $700/class

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