Department of Physics

1. Low temperature semiconductor measurement and analysis system

2. Multifunctional Semiconductor Measurement and Analysis System

3. Multifunctional High Frequency Semiconductor Measurement and Analysis System

Department of Nano Process

1. N & K Analyzer

2. 3D-surface profiler

3. Rapid Thermal Annealing System

4. Laser sputtering system

A total of seven instruments will join the services from now on.