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  2. Classification of charging standards
  3. Nano Process-Charges

MASK Aligner and Exposure System-Charges

  1.  Project:  $150/0.25 hours for self-operation; $350/0.25 hours for delegated operation

 Instrument training fee: $600/class, instrument certification fee: $600/class

  1.  Non-project: $350/0.25 hours for self-operation; $550/0.25 hours for delegated operation

 Instrument training fee: $600/class, instrument certification fee: $600/class

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