Field emission scanning electron microscopy (FESEM) utilizes a negatively charged metal tip to generate a small electron beam through the application of an electric field. Operating at extremely high vacuum levels (-10-10 torr), FESEM can produce high-quality resolution images. With the development of science and technology, nanoscience and nanotechnology have become the main axis of national high-tech development because they can meet the requirements of smaller and more refined components. By controlling material composition, interface structure, and other properties within the range of 1-100 nanometers and changing their manipulation, one can observe the resulting physical, chemical, and biological changes and apply them to industry. FESEM provides the most important tool for measuring and manipulating nanoscale structures.

Equipment Description

• Model：Germany Zeiss Gemini 450
• Acceleration voltage：0.2kV ~ 30kV
• Magnification：x20 ~ x1,000,000
• Sample stage：X：70mm , Y：50mm , Z：1 ~50mm
• Tilt angle：-5 ~70
• Rotation angle：360

Service Items

• SEI（Scanning Electron Image）material surface structure observation, broken surface observation, thin film coating observation
• BEI（Backscatter Electron Image）backscattered electron image observation
• Energy Dispersive Spectrometer can be used for qualitative, semi-quantitative analysis, linescan and mapping of micro-region components

Sampling Precautions

• For SEI and BEI parts: the size and diameter of the specimens should be within 25mm, and the height should not exceed 10mm. Please pre-process the test piece by yourself.
• The surface of the sample needs to be conductive, and the sample with a non-conductive surface needs to be carbon-plated or gold-plated, please handle it yourself first. If there is no prior processing, there is also on-site, but an additional cash fee is required (NT$200 per time)
• Please bring your own CD to access the files, it is forbidden to access files with flash drives
• Cancellation notice is required 2 days in advance, otherwise a penalty may be imposed. The basic usage fee will still be charged, and the appointment will be given to the next person on the waiting list.
• Toxic, corrosive, volatile, magnetic, or low melting point materials are prohibited.
• Please contact the technician by phone in advance for the preparation method of nano powder
• Please fill out the 'Polymer Application Form' for polymer materials. After review and approval, you may proceed to make a reservation.

Charges

Less than 1 hour will be charged as 1 hour

Additional use: 

• An additional NT$50/point is charged for point analysis of the EDS system.
• An additional NT$100/point is charged for surface and line analysis.

Contact Detail