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Field Emission Electron Probe Microanalyzer

Field Emission Electron Probe Microanalyzer (EPMA) can conduct qualitative and quantitative analysis of micro-area components for metal materials, electronic materials, ceramic materials, and minerals. The accuracy of its determination is much higher than ordinary EDS, making it a good tool for analysis of micro-area components.
X-ray, secondary electron, and backscattered electron (BEI) image observations of element characteristics in large areas and high magnifications can also be carried out by this equipment.

Equipment Description

  • Model:JEOL JXA-8530F Field Emission Electron Probe Microanalyzer
  • Specifications
    • Accelerating voltage:1kV~30 kV
    • Four wavelength-dispersive spectrometers (WDS): detectable element range: 5-B to 92-U(all elements with Z > 3)

Service Items

  • Qualitative and quantitative analysis
  • Secondary-electron (SEI) and backscattered-electron (BEI) imaging
  • X-Ray Mapping, Line Scanning

Charges

  1.  $600 per hour for those with a project, $1200 per hour for those who are non-project
  2.  Quantitative analysis: $20 per point for those with a project, $100 per point for those who are non-project
  3.  Line scan, mapping analysis, qualitative analysis: $80 each time for those with a project, $300 each time for those who are non-project

Preparation of specimens

  • The upper and lower surfaces for samples intended for quantitative analysis, line scanning, and elemental X-Ray Mapping analysis must be flat and parallel, and the analysis surface must be polished.
  • If it is a non-conductive sample, it is necessary to evaporate a layer of conductive film (usually carbon) or other special treatment.
  • The size of Hot Mount or Cold Mount is 35mm or 25mm in diameter and 20mm in height
  • The rest of the samples are less than 20mm in diameter and less than 13mm in height. Other sizes can be asked through the phone.

Contact Detail

Instrument expert: Prof. ZHE-NAN, GUO
Technical staff: JING WEI GAO
contact method: (07)5252000 ext. 4072 kauwei36@staff.nsysu.edu.tw
Place: Materials Building 3F, Room MS3024
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