Field Emission Electron Probe Microanalyzer

Field Emission Electron Probe Microanalyzer (EPMA) can conduct qualitative and quantitative analysis of micro-area components for metal materials, electronic materials, ceramic materials, and minerals. The accuracy of its determination is much higher than ordinary EDS, making it a good tool for analysis of micro-area components.
X-ray, secondary electron, and backscattered electron (BEI) image observations of element characteristics in large areas and high magnifications can also be carried out by this equipment.
Equipment Description
- Model:JEOL JXA-8530F Field Emission Electron Probe Microanalyzer
- Specifications
- Accelerating voltage:1kV~30 kV
- Four wavelength-dispersive spectrometers (WDS): detectable element range: 5-B to 92-U(all elements with Z > 3)
Service Items
- Qualitative and quantitative analysis
- Secondary-electron (SEI) and backscattered-electron (BEI) imaging
- X-Ray Mapping, Line Scanning
Charges
- $600 per hour for those with a project, $1200 per hour for those who are non-project
- Quantitative analysis: $20 per point for those with a project, $100 per point for those who are non-project
- Line scan, mapping analysis, qualitative analysis: $80 each time for those with a project, $300 each time for those who are non-project
Preparation of specimens
- The upper and lower surfaces for samples intended for quantitative analysis, line scanning, and elemental X-Ray Mapping analysis must be flat and parallel, and the analysis surface must be polished.
- If it is a non-conductive sample, it is necessary to evaporate a layer of conductive film (usually carbon) or other special treatment.
- The size of Hot Mount or Cold Mount is 35mm or 25mm in diameter and 20mm in height
- The rest of the samples are less than 20mm in diameter and less than 13mm in height. Other sizes can be asked through the phone.
Contact Detail
Instrument expert:
Prof. ZHE-NAN, GUO
Technical staff:
JING WEI GAO
contact method:
(07)5252000 ext. 4072 kauwei36@staff.nsysu.edu.tw
Place:
Materials Building 3F, Room MS3024
Click Num:
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