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Auger Electron Spectroscopy

Aujie Electron Spectrometer (AES) and X-ray Photoelectron Spectrometer (XPS) can be used to analyze the surface texture and chemical structure of materials, and are suitable for research fields such as thin films, materials, electronics, chemistry, chemicals, machinery, and electrical machinery.

AES uses an electron beam as the excitation source, and the electrons in the inner energy level of the free surface atoms make the outer energy level electrons fill the generated holes, and release energy, which is then transmitted to the outer energy level electrons of the same atom, resulting in the acceptance of energy The excitation of electrons is dissociated, and the dissociated electrons are called Oujie electrons, which have characteristic kinetic energy, and the types of elements on the surface of the material are judged according to their kinetic energy.

XPS uses the photoelectric effect. When the material surface is irradiated by X-Ray (electromagnetic waves), the electrons in the atoms absorb the X-Ray energy and then dissociate. The electrons are called photoelectrons, and their kinetic energy is the energy of the incident electromagnetic wave minus the electrons in the atoms The photoelectrons of different elements have their specific kinetic energies, so they can be used to determine the elemental composition of the material surface.

Equipment Description

  • Model:JEOL , JAMP-9500F Auger Electron Spectroscopy

  • Specifications:
  •  Acceleration voltage 0.5~30KV, energy resolution 0.8%;
  •  XPS X light source - double anode Mg Kα / Al Kα;
  •  Max power – Mg 500W / Al 600W

Service Items

  • Auger:full energy spectrum, single element energy spectrum, element image scan, depth distribution map
  • XPS:chemical state/composition analysis, depth distribution map

Charges

NT$3,000 per hour (including sample processing time, sample vacuuming time and shutdown waiting time), each service is charged for at least three hours.

Preparation of specimens

  • Samples must not be magnetic, toxic, radioactive or cause damage to vacuum chamber parts
  • Samples are limited to low non-volatility to avoid contamination of the ultra-high vacuum system
  • Please send two samples for the proxy test service in case of difficulties in the test
  • If the sample contains highly volatile molecules or coatings, please be sure to exhaust yourself in advance
  • During analysis and testing, if the sent sample is found not to meet the requirements, the sample will be returned and paid according to the working hours
  • AES: a rectangular shape with an area of 0.9cm * 0.5cm, or a circular shape with a diameter of 9mm, and a thickness of 0.2cm
  • The maximum size of the specimens: 9mm (diameter) x 1mm (thickness)
  • XPS specimens size: 9mm (length) x 8mm (width) x 0.2mm (thickness)

Contact Detail

Instrument expert: Prof. Chih-Kuang Chen
Technical staff: Shu-Ying Shi
contact method: (07)5252000 ext. 4083 amysy@mail.nsysu.edu.tw
Place: Materials Building 3F, Room MS3025
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