This instrument is an advanced triple-beam focused ion beam microscope, equipped with high-performance focused ion beam, high-resolution field emission electron microscope, and low-energy argon ion beam thinning function, making it possible for rapid sample preparation, high-resolution observation, and precise nanoscale machining of TEM samples.

The main function of this instrument is to provide a micro-machining workstation for rapid analysis of material properties. It can be used for samples with high grinding difficulty or those that require precise cutting and observation, making it highly versatile and enabling users to save valuable time and obtain experimental results that were previously difficult to achieve.

Equipment Description

• Model：Hitachi NX2000
• Specification：

1.  FIB acceleration voltage：0-30 kV
2.  Ion beam current：≧100 nA
3.  FIB resolution：4 nm best at 30 kV; 60 nm best at 2 kV
4.  Ion source：liquid gallium (Ga) ion source
5.  FIB electromagnetic lens system：low spherical aberration electromagnetic lens system
6.  SEM acceleration voltage：0.5 - 30 kV
7.  SEM resolution：2.8 nm best at 5 kV; 3.5 nm best at 5 kV
8.  Electron source：field emission type (cold field)
9.  Detector：secondary electron and backscattered electron detector
10.  Sample stage movement range：

    X: 205 mm ,Y: 205mm , Z: 10 mm

    T: -5 - 60°, R: 360°

11.  Argon Ion Beam Thinning System
12.  Electronic Microprobe Sampling System
13.  Depositable materials：C, Pt
14.  Sample composition analysis system(EDS)：

   Effective Area：50mm²

   Resolution：≦127eV

15.  Double tiltable stage
16.  Stage swing function
17.  Automatic preparation of TEM specimen function

Function and use

• Function

1.  Precise spot cutting - etch anywhere in the visible range
2.  Synchronous observation - SEM can be used to observe the etching status synchronously during ion beam cutting, so as to grasp the etching progress
3.  Selective material deposition - carbon or platinum can be deposited at specific locations
4.  Better quality TEM specimens can be produced with argon ion beam
5.  Sample composition can be analyzed while cutting
6.  Can remove the curtain effect caused by the ion beam

• Use

1.  Rapid production of high-quality TEM specimens for material analysis
2.  Sample Cross Section Observation
3.  Etch a specific pattern
4.  Simple Line Repair
5.  Sample composition analysis

Service items

1.  Production of transmission electron microscope test pieces (can improve the success rate of test piece production and shorten the production time)
2.  Component Failure Analysis
3.  Chemical element analysis
4.  Special Pattern Etching
5.  Selective deposition of metals or non-metals

Charge

• Project: NT$3,00/hour
• Non-project: NT$8,000/hour

Preparation of specimens

• Materials with low melting point, such as Indium, Tin, etc., will result in phase transition and evaporation effect, please do not reserve this machine.
• Samples like organic compound, polymers, powder materials, high magnetic materials (Fe, Co, Ni), etc. that will decompose or release gas under electron beam irradiation will not be accepted because they will cause vacuum shutdown or contaminate the chamber.
• The user must specify the composition of the sample detail. If it may cause contamination of the chamber, we have the right to reject it.
• The maximum sample size is the size of an 8-inch wafer, but 0.5 cm X 0.5 cm fragments are better in principle.
• If the user causes contamination or damage to the instrument due to improper operation, he shall be responsible for compensation and suspend the right to use the instrument, and the compensation fee shall be assessed by the original factory.

※When the self-operator collides with the column for the first time, if the situation is minor, he will be suspended for one month first, and then re-certify after one month; if there is a serious impact, the rights will be permanently suspended and compensation will be demanded from it. If a second impact occurs after the certification is passed, the rights will be suspended for life.

※If the self-operator does not use it within 21 days, it is forbidden to make an appointment for the night, and can only make an appointment for the day (or when the technician is there). After the technician approves, he can make an appointment for the evening operation.

• The surface of the samples needs to be conductive, and the non-conductive sample surface needs to be deposited carbon or platinum on it, please handle it yourself first.
• Be sure to call the operator in advance before making an online appointment, so as to facilitate the technician's operation and judge the hours.
• You must be present if you book FIB for the first time.
• If the experiment time does not reach the reserved hours,the rest of the time will be calculated as usual.
• During the experiment, if we found the sample violated the rules and the experiment cannot finish, the fee will be charged as usual.
• Cancellation must be informed 2 days ago. It will be charged in full if notified on the same day.

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