Equipment Description

• Model：Peva-600E

Function and use

1. Thin film deposition：various metals, alloys and insulators can be deposited
2. This laboratory provides Cu, Ni, Ti,  Al plating materials and crucibles; please bring other plating materials and crucibles by yourself (this laboratory provides Mo crucibles, and those who need them can purchase them from the instrument technician)
3. Gas N2, O2 can be introduced
4. Process temperature up to 350^oC
5. Dual-gun co-plating: various alloys can be plated
6. Vacuum (base pressure): 9E-6 Torr

Equipment Specifications and Applicable Substrates

•  non-uniformity: < 10%
•  Can hold 2”, 3”, 4”, 6” substrates and fragments at the same time
•  The number of crucibles that can be placed: 12 pieces in total for Dual-gun

Service Notice

1. The equipment can be opened for self-operation during non-holiday days after passing the assessment.
2. Self-operators must sign up for <<Industrial Safety and Instrument Training>> and <<Instrument Certification>> on the website, and hang in “a. Basic user information”, “b. Laboratory user safety commitment statement and health notify” form after passing the two courses. Next you will be able to apply for the clean room identification certificate and magnetic card, then enter the clean room to operate the equipment.
3. Those who operate on their own for 15 hours during the day are able to operate at night and on holidays.
4. The service of this system takes 0.25 hours as a unit.
5. The delegated operation is uniformly open on Wednesdays from 09:00 to 17:00. Please confirm the time period with the instrument technician first, and then go online to make an appointment for the delegation time. If the delegation time is not on Wednesday, the fee will be charged double as a rush.
6. Cancellation must be done 1 day in advance, otherwise the usage fee will be charged in full according to the reservation time.
7. If the actual hours used are less than the reserved hours, and the difference between these two periods is more than 1 hour, the rest of the time will be calculated at 50% of the unit price.
8. If you use the equipment without a reservation, you will be charged 1.5 times.
9. Those who pass the assessment but have no record of self-operation for 6 consecutive months will be disqualified for self-operation. If you need self-operation in the future, additional application, training, and assessment will be required, only the fee will be charged at half price.

Charge

1. Project:  $250/0.25 hours for self-operation; $420/0.25 hours for delegated operation

Instrument training fee: $1100/class, instrument certification fee: $600/class

2. Non-project: $450/0.25 hours for self-operation; $500/0.25 hours for delegated operation

Instrument training fee: $1100/class, instrument certification fee: $600/class

Notices of Specimens

• The substrate can be heated for usage, but do not put volatile substances such as photoresist in the equipment during the heating process. If you have special needs, you can discuss it with the technician. For vacuum tape, please use materials that can withstand heat up to 250 degrees, violators will be fined and re-examined as punishment.
• If there is a problem while operating, please notify the relevant personnel (for example, notify the factory staff if the process gas pressure is not enough, notify the technician if it’s the instrument or other problems)
• If self-operators need to use their own plating materials, they must inform the instrument technicians of the composition and characteristics of the plating materials before making an appointment. After the consent of the instrument instructor, the new plating materials must be commissioned. After the parameters are established on the instrument, the next time you can make a reservation by yourself.
• Once the instrument technician finds out that the instrument is damaged or malfunctioning, those who do not fill in the record book correctly will be suspended for two weeks for the first time. And re-examination will be performed if it’s the second time. Besides, if the equipment is damaged due to improper operation by human factors, the person will be responsible for compensation for maintenance costs.
• For delegated operators, please contact the technician to confirm the delegated time period before going online for an appointment.

Contact Detail