Equipment Description

• Model：FA04

Function and use

1.  6” Wafer, Quartz
2.  Gas N2, N2O, NH3, H 2O. can be introduced
3.  Maximum temperature: 1000°C. (It is recommended that the annealing temperature be lower than 800°C, otherwise it will take a long time to reach the set temperature and the carrier will be deformed and damaged.)
4.  Vacuum (base pressure): 5E-6 Torr

Equipment Specifications and Applicable Substrates

• 2”, 3”, 4”, 6” substrates and fragments, please prepare the 6” Si wafer used as the carrier plate by yourself or purchase it from the instrument technician

Service Notice

1. The equipment can be opened for self-operation during non-holiday days after passing the assessment.
2. Self-operators must sign up for <<Industrial Safety and Instrument Training>> and <<Instrument Certification>> on the website, and hang in “a. Basic user information”, “b. Laboratory user safety commitment statement and health notify” form after passing the two courses. Next you will be able to apply for the clean room identification certificate and magnetic card, then enter the clean room to operate the equipment.
3. Those who operate on their own for 15 hours during the day are able to operate at night and on holidays.
4. The service of this system takes 0.25 hours as a unit.
5. The delegated operation is uniformly open on Wednesdays from 09:00 to 17:00. Please confirm the time period with the instrument technician first, and then go online to make an appointment for the delegation time. If the delegation time is not on Wednesday, the fee will be charged double as a rush.
6. Cancellation must be done 1 day in advance, otherwise the usage fee will be charged in full according to the reservation time.
7. If the actual hours used are less than the reserved hours, and the difference between these two periods is more than 1 hour, the rest of the time will be calculated at 50% of the unit price.
8. If you use the equipment without a reservation, you will be charged 1.5 times.
9. Those who pass the assessment but have no record of self-operation for 6 consecutive months will be disqualified for self-operation. If you need self-operation in the future, additional application, training, and assessment will be required, only the fee will be charged at half price.

Charge

1.  Project:  $110/0.25 hours for self-operation; $250/0.25 hours for delegated operation

 Instrument training fee: $600/class, instrument certification fee: $600/class

2.  Non-project: $280/0.25 hours for self-operation; $300/0.25 hours for delegated operation

 Instrument training fee: $600/class, instrument certification fee: $600/class

Notices of Specimens

• If there is a problem in the process, please notify the relevant personnel (for example, the process gas pressure is not enough to notify the factory staff, or the instrument and other problems to notify the technician)
• Hydrogen and ammonia are temporarily closed to general users. If you want to use hydrogen and ammonia, please entrust an instrument technician to operate.
• When the temperature is lower than 600℃: the holding time should not exceed 5 minutes. Temperature 600℃~800℃: The temperature holding time should not exceed 3 minutes, and the set temperature should not exceed the melting point of the test piece.
• Those who do not fill in the record book correctly, if the instrument technician finds out that the instrument is damaged and malfunctioning, will be suspended for two weeks for the first time, and the second re-examination will be performed. If the instrument is damaged due to improper operation due to human factors, it will be responsible for compensation for maintenance costs.
• For entrusted operators, please contact the instrument technician to confirm the entrusted time slot before going online to make an appointment for entrusted time slots.

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