Equipment Description

• Model：AG350 - 6B

Function and use

1.  single side ligner

 Deep UV(power = 500W)

2.  Resolution＜0.6 μm
3.  Actual measurement report with resolution < 0.4 μm
4.  Camera CCD
5.  Maskholder ”x5” and 4”x4”
6.  Chuckfragments up to 2” x 2” and 4” x 4”
7.  Automatic operation program storage and control system (> 50 groups of programs)
8.  Minimum fragment handling capacity ≦ 5x 5mm (not limited to center point)
9.  Optical microscope maximum magnification ≧ 500 times minimum magnification ≦ 50 times
10.  Average moving resolution ≦ 0.1μm

Equipment Specifications and Applicable Substrates

• Can place 3”x3”, 4”x 4” or 5”x 5” mask
• The sample placement stage has two sizes of 2” x 2” and 4” x 4”

Service Notice

1. The equipment can be opened for self-operation during non-holiday days after passing the assessment.
2. Self-operators must sign up for <<Industrial Safety and Instrument Training>> and <<Instrument Certification>> on the website, and hang in “a. Basic user information”, “b. Laboratory user safety commitment statement and health notify” form after passing the two courses. Next you will be able to apply for the clean room identification certificate and magnetic card, then enter the clean room to operate the equipment.
3. Those who operate on their own for 15 hours during the day are able to operate at night and on holidays.
4. The service of this system takes 0.25 hours as a unit.
5. The delegated operation is uniformly open on Wednesdays from 09:00 to 17:00. Please confirm the time period with the instrument technician first, and then go online to make an appointment for the delegation time. If the delegation time is not on Wednesday, the fee will be charged double as a rush.
6. Cancellation must be done 1 day in advance, otherwise the usage fee will be charged in full according to the reservation time.
7. If the actual hours used are less than the reserved hours, and the difference between these two periods is more than 1 hour, the rest of the time will be calculated at 50% of the unit price.
8. If you use the equipment without a reservation, you will be charged 1.5 times.
9. Those who pass the assessment but have no record of self-operation for 6 consecutive months will be disqualified for self-operation. If you need self-operation in the future, additional application, training, and assessment will be required, only the fee will be charged at half price.

Charge

1.  Project:  $150/0.25 hours for self-operation; $350/0.25 hours for delegated operation

 Instrument training fee: $600/class, instrument certification fee: $600/class

2.  Non-project: $350/0.25 hours for self-operation; $550/0.25 hours for delegated operation

 Instrument training fee: $600/class, instrument certification fee: $600/class

Notices of Specimens

• If there is a problem in the process, please notify the relevant personnel (for example, if the air pipe leaks, please notify the factory staff; or if there is a problem with the instrument, please notify the technician)
• In order to maintain the life of the mercury lamp of the exposure machine, after the exposure machine is used, it is also necessary to confirm the appointment time of the next user on the Internet. If it is within three hours, there is no need to turn off the mercury lamp. If it is beyond three hours, it can be turned off.
• After using the magnifying glass and the optical microscope on the exposure machine, please adjust the intensity of the light source to the minimum and then turn off the main switch, so as not to reduce the life of the filament
• Do not change the parameters of the spin coater arbitrarily
• Do not change the temperature of the baking tray arbitrarily
• Those who do not fill in the record book correctly, if the instrument technician finds out that the instrument is damaged and malfunctioning, will be suspended for two weeks for the first time, and the second re-examination will be performed. If the instrument is damaged due to improper operation due to human factors, it will be responsible for compensation for maintenance costs
• For entrusted operators, please contact the instrument technician to confirm the entrusted time slot before going online to make an appointment for entrusted time slots

Contact Detail

Advisor: Prof. Hsiung Chou

TEL：(07)5252000 ext. 3722；E-mail：hchou@mail.nsysu.edu.tw

Technical Staff: Mr. Su Tz Chian

TEL：(07)5252000 ext. 3722；E-mail：8798xw@gmail.com

Location: College of Science 1F, Room SC1013