Equipment Description

• Model：n&k Technology, Inc., n&k Analyzer 1280

Function and use

1.  Reflection spectrum and transmission spectrum measurement

• DUV-Visible-NIR, 190 nm - 1000 nm, 1 nm Intervals

2.  Measurement of film properties：

• Thickness, d
• Index of Refraction, n
• Extinction Coefficient, k
• Energy Bandgap, Eg
• Interface Roughness, σ

3.  Capable of measuring the thickness of extremely thin films
4.  Can measure single layer or multi-layer film thickness

Equipment Specifications and Applicable Substrates

• Wavelength range: 190nm~1000nm
• Applicable substrates: both opaque and transparent substrates are available
• Substrate size: 2”, 3”, 4”, 6” size or fragments
• Measurable film materials:

-semiconductor
-dielectric
-transparent conductors
-photoresist (thickest up to 120μm)
-polymer
-color filter
-very thin metal film (below 500Å)

Service Notice

1. The equipment can be opened for self-operation during non-holiday days after passing the assessment.
2. Self-operators must sign up for <<Industrial Safety and Instrument Training>> and <<Instrument Certification>> on the website, and hang in “a. Basic user information”, “b. Laboratory user safety commitment statement and health notify” form after passing the two courses. Next you will be able to apply for the clean room identification certificate and magnetic card, then enter the clean room to operate the equipment.
3. Those who operate on their own for 15 hours during the day are able to operate at night and on holidays.
4. The service of this system takes 0.25 hours as a unit.
5. The delegated operation is uniformly open on Wednesdays from 09:00 to 17:00. Please confirm the time period with the instrument technician first, and then go online to make an appointment for the delegation time. If the delegation time is not on Wednesday, the fee will be charged double as a rush.
6. Cancellation must be done 1 day in advance, otherwise the usage fee will be charged in full according to the reservation time.
7. If the actual hours used are less than the reserved hours, and the difference between these two periods is more than 1 hour, the rest of the time will be calculated at 50% of the unit price.
8. If you use the equipment without a reservation, you will be charged 1.5 times.
9. Those who pass the assessment but have no record of self-operation for 6 consecutive months will be disqualified for self-operation. If you need self-operation in the future, additional application, training, and assessment will be required, only the fee will be charged at half price.

Charge

1.  Project:  $200/15 min for self-operation; $300/15 min for delegated operation

 Instrument training fee: $600/class, instrument certification fee: $600/class

2.  Non-project: $400/15 min for self-operation; $450/15 min for delegated operation

 Instrument training fee: $600/class, instrument certification fee: $600/class

Notices of Specimens

1. If there is any problem in the process, please notify the relevant personnel (for example, please notify the instrument technician of the sample calibration problem)
2. In order to maintain the life of the light source, after the instrument is used, it is necessary to go online to confirm the appointment time of the next user. If it is within three hours, there is no need to turn off the light source. If it is beyond three hours, it can be turned off.
3. If there is no one to make an appointment for the first time period before use, please be sure to warm up the machine and the light bulb one hour in advance, and then log in to the windows system to perform N&K measurement.
4. At least 30 mins interval between power-on and power-off is required to protect the lifespan of the bulb.
5. Those who do not fill in the record book correctly, if the instrument technician finds out that the instrument is damaged and malfunctioning, will be suspended for two weeks for the first time, and the second re-examination will be performed. If the instrument is damaged due to improper operation due to human factors, it will be responsible for compensation for maintenance costs.
6. For entrusted operators, please contact the instrument technician to confirm the entrusted time slot before going online to make an appointment for entrusted time slots.

Contact Detail